Principle : The analysis EBSD is a technique for crystallographic analysis local based on the exploitation of the diffraction patterns of electrons backscattered. it allows you to connect the crystallography of the microstructure of the sample. this is the huge advantage that it has compared to the conventional method of crystallographic analysis the diffraction of x-rays. however, the latter typically allows to achieve a more global study of the sample.
The angular resolution, obtained by ebsd when we measure a direction, is less than 0.5°, while the spatial resolution is of the order of micron in an sem of conventional (filament, tungsten) and of the order of a few tens of nanometers in a sem high-resolution type feg.
a detector ebsd is mainly composed of a fluorescent screen, on which will form the diffraction diagrams, and camera at low light level, which will allow retrieving the image of these diagrams. the detector is usually placed in a scanning electron microscope (sem). the electron beam generated by the sem will come to colliding with the sample surface tilted 70°, to allow to obtain the best compromise between a maximum emission of the backscattered electron and the limitation of the harmful effects of the roughness of the sample.